| contributor author | Sum Huan Ng | |
| contributor author | Inho Yoon | |
| contributor author | Steven Danyluk | |
| contributor author | C. Fred Higgs | |
| date accessioned | 2017-05-09T00:17:58Z | |
| date available | 2017-05-09T00:17:58Z | |
| date copyright | April, 2005 | |
| date issued | 2005 | |
| identifier issn | 0742-4787 | |
| identifier other | JOTRE9-28731#287_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/132702 | |
| description abstract | Pressure and shear flow factors (Patir and Cheng, 1978) were used to take into account the roughness of the pad surface in the modeling of the interfacial fluid pressure during chemical mechanical polishing. An attempt was made to explain the physical meaning of the flow factors in this particular application. Additionally, a parametric study was carried out to see the effect on the model after the incorporation of the flow factors. The pressure and shear flow factors were found to have a competing effect on the magnitude of the sub-ambient fluid pressure. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | An Analysis of Mixed Lubrication in Chemical Mechanical Polishing | |
| type | Journal Paper | |
| journal volume | 127 | |
| journal issue | 2 | |
| journal title | Journal of Tribology | |
| identifier doi | 10.1115/1.1760551 | |
| journal fristpage | 287 | |
| journal lastpage | 292 | |
| identifier eissn | 1528-8897 | |
| keywords | Flow (Dynamics) | |
| keywords | Lubrication | |
| keywords | Surface roughness | |
| keywords | Polishing | |
| keywords | Shear flow | |
| keywords | Pressure | |
| keywords | Fluid pressure | |
| keywords | Stress | |
| keywords | Equations AND Film thickness | |
| tree | Journal of Tribology:;2005:;volume( 127 ):;issue: 002 | |
| contenttype | Fulltext | |
