| contributor author | Yuwen Zhang | |
| date accessioned | 2017-05-09T00:13:35Z | |
| date available | 2017-05-09T00:13:35Z | |
| date copyright | November, 2004 | |
| date issued | 2004 | |
| identifier issn | 1087-1357 | |
| identifier other | JMSEFK-27832#796_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/130347 | |
| description abstract | A parametric study on shape and cross-sectional area of the thin film produced by Laser Chemical Vapor Deposition (LCVD) with a moving laser beam is presented. The problem is formulated in the coordinate system that moves with the laser beam, and, therefore, the problem is a quasi-steady state. The effects of laser scanning velocity, laser power, and radius of the laser beam on the shapes of the deposited film are investigated. A simulation-based correlation of the cross-sectional area is proposed based on the simulation results. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam | |
| type | Journal Paper | |
| journal volume | 126 | |
| journal issue | 4 | |
| journal title | Journal of Manufacturing Science and Engineering | |
| identifier doi | 10.1115/1.1813478 | |
| journal fristpage | 796 | |
| journal lastpage | 800 | |
| identifier eissn | 1528-8935 | |
| keywords | Thin films | |
| keywords | Lasers | |
| keywords | Simulation | |
| keywords | Chemical vapor deposition | |
| keywords | Laser beams AND Shapes | |
| tree | Journal of Manufacturing Science and Engineering:;2004:;volume( 126 ):;issue: 004 | |
| contenttype | Fulltext | |
