| contributor author | Vinay Kadekar | |
| contributor author | Weiya Fang | |
| contributor author | Frank Liou | |
| date accessioned | 2017-05-09T00:13:35Z | |
| date available | 2017-05-09T00:13:35Z | |
| date copyright | November, 2004 | |
| date issued | 2004 | |
| identifier issn | 1087-1357 | |
| identifier other | JMSEFK-27832#787_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/130346 | |
| description abstract | This paper discusses the microdeposition technologies used in the fabrication of meso- and microscale structures. The ability to process a wide range of materials and the flexibility to build functional and geometrically complex structures in meso- and microscale gives the microdeposition method some advantages over micromachining or lithography methods investigated extensively in the past. In this paper, work on deposition technology is reviewed, including material, supply of material, powder flow rate, and manipulation of particles and microdeposition technologies. The advantages and disadvantages of each technology are summarized at the end of the paper. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Deposition Technologies For Micromanufacturing: A Review | |
| type | Journal Paper | |
| journal volume | 126 | |
| journal issue | 4 | |
| journal title | Journal of Manufacturing Science and Engineering | |
| identifier doi | 10.1115/1.1811118 | |
| journal fristpage | 787 | |
| journal lastpage | 795 | |
| identifier eissn | 1528-8935 | |
| keywords | Flow (Dynamics) | |
| keywords | Lasers | |
| keywords | Particulate matter | |
| keywords | Laser beams AND Manufacturing | |
| tree | Journal of Manufacturing Science and Engineering:;2004:;volume( 126 ):;issue: 004 | |
| contenttype | Fulltext | |
