| contributor author | Mohammad I. Kilani | |
| contributor author | Paul C. Galambos | |
| contributor author | Yousef S. Haik | |
| contributor author | Ching-Jen Chen | |
| date accessioned | 2017-05-09T00:10:37Z | |
| date available | 2017-05-09T00:10:37Z | |
| date copyright | March, 2003 | |
| date issued | 2003 | |
| identifier issn | 0098-2202 | |
| identifier other | JFEGA4-27184#339_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/128622 | |
| description abstract | A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT), and presents an analytical solution of the flow field in its spiral channel. The pump characteristics are obtained experimentally for a scaled-up prototype and are found to be in good agreement with the results obtained using the analytical model. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump | |
| type | Journal Paper | |
| journal volume | 125 | |
| journal issue | 2 | |
| journal title | Journal of Fluids Engineering | |
| identifier doi | 10.1115/1.1524582 | |
| journal fristpage | 339 | |
| journal lastpage | 344 | |
| identifier eissn | 1528-901X | |
| keywords | Flow (Dynamics) | |
| keywords | Channels (Hydraulic engineering) | |
| keywords | Design | |
| keywords | Pumps | |
| keywords | Micromachining AND Approximation | |
| tree | Journal of Fluids Engineering:;2003:;volume( 125 ):;issue: 002 | |
| contenttype | Fulltext | |
