Process Window Derivation With an Application to Optical Media Manufacturing

Abstract

This paper derives the process window from quantitative process models. Multi-dimensional clipping algorithms are developed that operate on half-spaces defined from the quality specifications. The resulting polytope is difficult to directly interpret. To support interactive tuning and optimization of manufacturing processes, three types of graphical matrices are presented to the decision maker: (1) the function matrix describes the relations between the process parameters and the manufactured part quality attributes; (2) the process space illustrates the feasible processing space constrained by the product quality specifications; (3) the performance space provides the feasible region of the part quality attributes and the Pareto Optimal set corresponding to the processing space. Optimization of optical media manufacturing is presented to demonstrate the use of the process window to locate a feasible solution and proceed to a desired trade-off of multiple quality attributes.