Show simple item record

contributor authorH. Hosaka
contributor authorK. Itao
date accessioned2017-05-09T00:01:30Z
date available2017-05-09T00:01:30Z
date copyrightJanuary, 1999
date issued1999
identifier issn1048-9002
identifier otherJVACEK-28846#64_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/123148
description abstractThe damping characteristics of microcantilevers are clarified analytically and experimentally to establish a dynamic design method of micromechanical systems. First, an approximate formula of airflow damping was derived using the Navier-Stokes equation. A precise measurement apparatus was then developed to verify the theory. The damping ratios of cantilevers ranging from 0.1 mm to 100 mm in length were measured, and the effects of beam size, vibrational mode number, and vibrational amplitude on the damping ratio were studied.
publisherThe American Society of Mechanical Engineers (ASME)
titleTheoretical and Experimental Study on Airflow Damping of Vibrating Microcantilevers
typeJournal Paper
journal volume121
journal issue1
journal titleJournal of Vibration and Acoustics
identifier doi10.1115/1.2893949
journal fristpage64
journal lastpage69
identifier eissn1528-8927
keywordsDamping
keywordsAir flow
keywordsMicrocantilevers
keywordsNavier-Stokes equations
keywordsDesign methodology
keywordsCantilevers
keywordsFormulas AND Vibrational modes
treeJournal of Vibration and Acoustics:;1999:;volume( 121 ):;issue: 001
contenttypeFulltext


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record