A Linear Piezomotor Integrated by a Monolithic Flexural Frame

Abstract

A novel linear piezomotor is developed for machine tool applications. This paper presents the design strategy for this high stiffness linear piezomotor with nanometer resolution. The linear piezomotor consists of three piezoelectric actuators and one monolithic flexural frame. The design strategy is to reduce the total number of mechanical elements and interfaces and to integrate all the elements into the frame. The finite element method is used in the design process. The design strategy should also be applicable to other positioning systems where a high stiffness and high positioning resolution are required.