A Consideration of Surface Roughness Measurement by Optical Method

Abstract

A modified reflection theory based on Beckmann and Spizzichino is described which evaluates the surface roughness in connection with Rmax roughness value. Computer simulations due to this theory are relatively in good agreement with the experiments. Further, the simulation results suggest that the reflection characteristics can be freely changed to some extent by varying the incidence and acceptance angles of light. Also, the proposed measuring system is easily applicable to the real-time detection of turned surfaces without affecting its working accuracy.