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Vibration and Deflection of a Silicon-Wafer Slicer Cutting the Crystal Ingot
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot is studied analytically. The blade is clamped and then tensioned in the radial direction at the outer boundary. The ...
Stress Analysis of a Silicon-Wafer Slicer Cutting the Crystal Ingot
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In-plane stress distribution in a spinning free-clamped slicing blade is studied analytically. The blade is subjected to a stationary, distributed, in-plane slicing load along the inner periphery, ...