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RISState-of-the-Art of Thermo-Mechanical Characterization of Thin Polymer Films
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In microelectronic industry, thin polymer layers are one of the more commonly used product constituents. Examples are glue layers, coatings, and dielectric layers. The thicknesses of these films ...
Finite Thickness Influence on Spherical and Conical Indentation on Viscoelastic Thin Polymer Film
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The thermo-mechanical integration of polymer films requires a precise knowledge of material properties. Nanoindentation is a widely used testing method for the determination of material properties ...