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    Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma 

    Source: Journal of Manufacturing Science and Engineering:;2013:;volume( 135 ):;issue: 006:;page 61015
    Author(s): Zhao, X.; Shin, Y. C.
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: In this paper, the femtosecond laser ablation of silicon is investigated by a twodimensional hydrodynamic model. The ablation depth of the silicon wafer ablated in air at different laser intensities is calculated, and the ...
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