Abstract: A fast temperature ramp of rapid thermal processing (RTP) with convective cooling used to shorten the cooling time for the wafer is presented in this paper. Based on thermal and stress analyses, ...

Abstract: The concept of rapid thermal processing has many potential applications in microelectronics manufacturing, but the details of chamber design remains an active area of research. In this work the ...

Abstract: In this work, the analytical solution of a fundamental problem of heat conduction in anisotropic medium is derived. The steady-state temperature field in an anisotropic trimaterial subject to ...