Abstract: This paper reports and compares Raman and infrared thermometry measurements along the legs and on the shuttle of a SOI (silicon on insulator) bentbeam thermal microactuator. Raman thermometry offers micron spatial resolution ...

Abstract: Accurate thermal conductivity values are essential for the successful modeling, design, and thermal management of microelectromechanical systems (MEMS) and devices. However, the experimental technique best suited to measure ...