Abstract: A 4.2-mm diameter silicon rotor has been operated in a controlled and sustained manner at rotational speeds greater than 1.3 million rpm and power levels approaching 5 W. The rotor, supported ...

Abstract: Ultrashort microscale high-speed gas bearings exhibit a whirl instability limit and dynamic behavior much different from conventional hydrostatic gas bearings. In particular, the design space for ...

Abstract: Silicon based power micro-electro-mechanical system (MEMS) applications require high-speed microrotating machinery operating stably over a large range of operating conditions. The technical barriers ...