Abstract: In this article, the development of quasistatic tension–torsion combined loading test equipment for a microscale beam specimen is described. The equipment is composed of a piezoelectric actuator in actuator case for ...

Abstract: In this paper, the influences of specimen size and test temperature on the viscoelastic properties of SU8 photoresist films are described. Films with the thicknesses of 1 خ¼m and 10 خ¼m are subjected to quasistatic ...

Abstract: In this paper, fabrication and mechanical characterization of silicon oxycarbide (SiOC) microparts made from polycarbosilane (PCS) precursor is described. The developed fabrication technique is a combination of ultraviolet ...

Abstract: Reactively bonded solder joints with Al/Ni exothermic films attract much attention in semiconductor and microelectromechanical systems (MEMS) industries. Higher bond strength of the joints is required for longterm mechanical ...

Abstract: Selfpropagating exothermic reaction bonding (SERB) technique with Al/Ni multilayer film is fascinating in the viewpoint of lots of outstanding features, such as atmosphereindependent exothermic reaction and its selfpropagation. ...

Abstract: In this paper, the effect of surface damage induced by focused ion beam (FIB) fabrication on the mechanical properties of silicon (Si) nanowires (NWs) was investigated. Uniaxial tensile testing of the NWs was performed ...