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Plasma Texturing Processes and a Si:H Surface Passivation on c Si Wafers for Photovoltaic Applications
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this work, we report the formation of pyramidlike structures on crystalline silicon (cSi) substrates using plasmatexturing processes, and also, we present optimized process conditions for the deposition of hydrogenated ...
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