Abstract: The objective of this study is to investigate slurries for chemical mechanical polishing (CMP) of chemically vapordeposited (CVD) diamond films based on the principle of thermokinetics combined with physical and chemical ...

Abstract: A ultrasonic elliptical vibration cutting (UEVC) technique, as an advanced cutting method, has been successfully applied to machine difficult-to-cut materials for the last decade. In this study, the mechanism of the ...