Abstract: Piezoresistive sensors have been demonstrated to be an accurate and efficient tool for stress measurements on chip surfaces inside microelectronic packaging. In this work, test chips with ...

Abstract: A joint coordinate self-tuning manipulator control method is presented which uses Cartesian setpoints. The method is capable of both position and hybrid control. Position and force errors are ...

Abstract: Due to the carrier mobility changes with the mechanical loading and its small size, the MOSFET (metal-oxide-semiconductor field-effective-transistor) has the potential to be a suitable chip stress ...