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Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Wafer quality control is one of the important processes to improve the yield rate of semiconductor products. Profile quality and defects in the wafer are two key factors that should be taken into consideration. In this ...
Hybrid Semiconductor Wafer Inspection Framework via Autonomous Data Annotation
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In smart manufacturing, semiconductors play an indispensable role in collecting, processing, and analyzing data, ultimately enabling more agile and productive operations. Given the foundational importance of wafers, the ...
Autonomous Robotic Bin Picking Platform Generated From Human Demonstration and YOLOv5
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Vision-based robots have been utilized for pick-and-place operations by their ability to find object poses. As they progress into handling a variety of objects with cluttered state, more flexible and lightweight operations ...