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RISAnalysis of One-Dimensional and Two-Dimensional Thin Film “Pull-in” Phenomena Under the Influence of an Electrostatic Potential
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A thin one-dimensional rectangular or two-dimensional axisymmetric film is clamped at the perimeter. An electrostatic potential (V0*) applied to a pad directly underneath the film leads to a ...