Abstract: A fast temperature ramp of rapid thermal processing (RTP) with convective cooling used to shorten the cooling time for the wafer is presented in this paper. Based on thermal and stress analyses, ...

Abstract: The antiplane interaction problem for an elastic circular inclusion embedded in an elastic half plane with an arbitrarily located crack is considered in this paper. Based on the technique of analytical continuation and the ...

Abstract: The concept of rapid thermal processing has many potential applications in microelectronics manufacturing, but the details of chamber design remains an active area of research. In this work the ...

Abstract: A pedicle screw fixation has been widely used to treat spinal diseases. Clinical reports have shown that the weakest part of the spinal fixator is the pedicle screw. However, previous studies ...