Abstract: Metalassisted chemical etching (MacEtch) of silicon shows reliable vertical anisotropic wet etching only in singlecrystal silicon, which limits its applications to a small number of devices. This work extends the capabilities ...

Abstract: This paper presents catalyst patterning techniques for promoting wafer-scale uniformity while producing taper-free high aspect ratio Si nanostructures using gold (Au) metal-assisted chemical etch (MacEtch). Typical Au ...