Passive Regulation of Thermally Induced Axial Force and Displacement in Microbridge Structures

Abstract

The analytical model of a mechanism for regulating the thermally induced axial force and displacement in a fixed–fixed microbeam is presented in this article. The mechanism which consists of a set of parallel chevron beams replaces one of the fixed ends of the microbeam. The thermomechanical behavior of the system is modeled using Castigliano’s theorem. The effective coefficient of thermal expansion is used in the analytical model. The analytical model takes into account both the axial and bending deformations of the chevron beams. The model provides a closed-form equation to determine the thermally induced axial force and displacement in the microbeam. In addition, the model is used to derive the equations for the sensitivities of the microbeam’s axial force and displacement to the variations of the design parameters involved. Moreover, the model produces the stiffness of the chevron beams. The effect of the stiffness of the chevron beams on the dynamic behavior of the microbeam is discussed. The analytical model is verified by finite element modeling using a commercially available software package. Using the analytical model, two special cases are highlighted: a system with thermally insensitive axial force and a system with thermally insensitive axial displacement. The main application of the model presented in this article is in the design of sensors and resonators that require robustness against changes of temperature in the environment. The analytical model and the sensitivity equations can be easily integrated into optimization algorithms.