Waste Generation and Minimization in Semiconductor Industry

Abstract

Semiconductors are electrical devices that perform functions such as processing and display, power handling, and conversion between light and electrical energy. Semiconductor production processes involve over 100 proprietary solutions and 200 generic materials to achieve the final product. This industry generates significant quantities of spent solvents and liquids containing metals. The economic and liability incentives caused by increasing disposal costs and more stringent regulations are resulting in efforts to minimize such wastes at the source. This paper provides information about: (1) The type and quantity of wastes produced by this industry, much of which are listed hazardous wastes; (2) the hazardous waste disposal problems facing this industry; and (3) waste minimization case studies.