Microelectronic Thermal Anemometer for the Measurement of Surface Wind

Abstract

The paper describes the development and first prototype results of a microelectronic thermal anemometer without moving parts, for the measurement of velocity and direction of surface wind. The central part of the instrument is an integrated-circuit (IC) sensor, which heats the sensing surface of the instrument and simultaneously detects the flow-induced temperature gradient on it. An aerodynamic probe shape was designed to guide the wind flow over the sensor and to protect the sensor against disturbing external influences. The prototype was tested in a wind tunnel for wind speeds between 1 and 25 m s?1. For this configuration the measurement error lies in the order of 1° in wind direction, and a few percent in wind speed. The response time to changing winds is 2 s; the flow detection threshold is estimated to be 1 cm s?1.