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contributor authorCaruntu, Dumitru I.
contributor authorKnecht, Martin W.
date accessioned2017-05-09T01:16:21Z
date available2017-05-09T01:16:21Z
date issued2015
identifier issn0022-0434
identifier otherds_137_04_041016.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/157499
description abstractThis paper deals with nonlinearparametric frequency response of alternating current (AC) near natural frequency electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators. The model includes fringe and Casimir effects, and damping. Method of multiple scales (MMS) and reduced order model (ROM) method are used to investigate the case of weak nonlinearities. It is reported for uniform resonators: (1) an excellent agreement between the two methods for amplitudes less than half of the gap, (2) a significant influence of fringe effect and damping on bifurcation frequencies and phase–frequency response, respectively, (3) an increase of nonzero amplitudes' frequency range with voltage increase and damping decrease, and (4) a negligible Casimir effect at microscale.
publisherThe American Society of Mechanical Engineers (ASME)
titleMicroelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency
typeJournal Paper
journal volume137
journal issue4
journal titleJournal of Dynamic Systems, Measurement, and Control
identifier doi10.1115/1.4028887
journal fristpage41016
journal lastpage41016
identifier eissn1528-9028
treeJournal of Dynamic Systems, Measurement, and Control:;2015:;volume( 137 ):;issue: 004
contenttypeFulltext


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