Static and Vibration Analyses of a Three Dimensional Snake Like Micropositioning Stage

Abstract

This paper presets three degrees of freedom (DOF) piezoelectric micropositioning stage. The stage is composed of a stack of piezodisk bender actuators actuated in such a way to prevent the endeffector from rotating; this way the endeffector can only translate along the x, y, and z axes. Thanks to its snakelike configuration, the system is capable of large displacements (of the order of 50 خ¼m) with low driving voltages (of the order of 100 V). Several lumpedmass static and dynamic models of the device have been implemented. Static experimental results, which are in agreement with simulation data, confirmed the performances of the device. A dynamic model showed the natural frequencies of the mechanism. Also dynamic tests have been conducted in order to validate the dynamic model.