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    An Experimental and Numerical Study of a Liquid Mixing Device for Microsystems

    Source: Journal of Electronic Packaging:;2005:;volume( 127 ):;issue: 002::page 141
    Author:
    Kazuyoshi Fushinobu
    ,
    Masashi Nakata
    DOI: 10.1115/1.1869511
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: A microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with SiO2 or Al2O3 wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the SiO2 wall is covered with a patterned Al2O3 thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect.
    keyword(s): Flow (Dynamics) , Manufacturing , Electroosmosis , Microchannels , Microelectromechanical systems AND Channels (Hydraulic engineering) ,
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      An Experimental and Numerical Study of a Liquid Mixing Device for Microsystems

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    https://yetl.yabesh.ir/yetl1/handle/yetl/131653
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    contributor authorKazuyoshi Fushinobu
    contributor authorMasashi Nakata
    date accessioned2017-05-09T00:15:53Z
    date available2017-05-09T00:15:53Z
    date copyrightJune, 2005
    date issued2005
    identifier issn1528-9044
    identifier otherJEPAE4-26243#141_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/131653
    description abstractA microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with SiO2 or Al2O3 wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the SiO2 wall is covered with a patterned Al2O3 thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleAn Experimental and Numerical Study of a Liquid Mixing Device for Microsystems
    typeJournal Paper
    journal volume127
    journal issue2
    journal titleJournal of Electronic Packaging
    identifier doi10.1115/1.1869511
    journal fristpage141
    journal lastpage146
    identifier eissn1043-7398
    keywordsFlow (Dynamics)
    keywordsManufacturing
    keywordsElectroosmosis
    keywordsMicrochannels
    keywordsMicroelectromechanical systems AND Channels (Hydraulic engineering)
    treeJournal of Electronic Packaging:;2005:;volume( 127 ):;issue: 002
    contenttypeFulltext
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    DSpace software copyright © 2002-2015  DuraSpace
    نرم افزار کتابخانه دیجیتال "دی اسپیس" فارسی شده توسط یابش برای کتابخانه های ایرانی | تماس با یابش
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