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    Effect of High Energy Ion Bombardment on the Tribological Properties of WS2 Sputtered Films

    Source: Journal of Tribology:;1988:;volume( 110 ):;issue: 004::page 621
    Author:
    Motohisa Hirano
    ,
    Shojiro Miyake
    DOI: 10.1115/1.3261703
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: An attempt was made to improve the tribological properties of WS2 sputtered film by bombarding the film surface with various inert gaseous ions (He+ , Ar+ , Kr+ , Xe+ ). The resulting changes in tribological properties were investigated together with related changes in physical properties such as morphology and crystallinity of the films. Bombardment by He+ and Ar+ effectively reduces WS2 film friction, whereas Kr+ – and Xe+ – bombardment increased WS2 film friction. The effect of high-energy ion bombardment is discussed in relation to the crystallinity of WS2 film.
    keyword(s): Tribology , Friction AND Ions ,
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      Effect of High Energy Ion Bombardment on the Tribological Properties of WS2 Sputtered Films

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    https://yetl.yabesh.ir/yetl1/handle/yetl/104468
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    contributor authorMotohisa Hirano
    contributor authorShojiro Miyake
    date accessioned2017-05-08T23:28:14Z
    date available2017-05-08T23:28:14Z
    date copyrightOctober, 1988
    date issued1988
    identifier issn0742-4787
    identifier otherJOTRE9-28472#621_1.pdf
    identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/104468
    description abstractAn attempt was made to improve the tribological properties of WS2 sputtered film by bombarding the film surface with various inert gaseous ions (He+ , Ar+ , Kr+ , Xe+ ). The resulting changes in tribological properties were investigated together with related changes in physical properties such as morphology and crystallinity of the films. Bombardment by He+ and Ar+ effectively reduces WS2 film friction, whereas Kr+ – and Xe+ – bombardment increased WS2 film friction. The effect of high-energy ion bombardment is discussed in relation to the crystallinity of WS2 film.
    publisherThe American Society of Mechanical Engineers (ASME)
    titleEffect of High Energy Ion Bombardment on the Tribological Properties of WS2 Sputtered Films
    typeJournal Paper
    journal volume110
    journal issue4
    journal titleJournal of Tribology
    identifier doi10.1115/1.3261703
    journal fristpage621
    journal lastpage627
    identifier eissn1528-8897
    keywordsTribology
    keywordsFriction AND Ions
    treeJournal of Tribology:;1988:;volume( 110 ):;issue: 004
    contenttypeFulltext
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