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RISSub-Beam Size Temperature Measurement of Heavily Doped Silicon Heater Using Two-Wavelength Thermoreflectance Microscopy
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This work describes a novel technique for simultaneously determining local temperature and thickness of a heavily doped Si heater having a submicron width by using two-wavelength thermoreflectance microscopy. The doped ...
Sub-Beam Size Temperature Measurement of Heavily Doped Silicon Heater Using Two-Wavelength Thermoreflectance Microscopy
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This work describes a novel technique for simultaneously determining local temperature and thickness of a heavily doped Si heater having a submicron width by using two-wavelength thermoreflectance microscopy. The doped ...