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RISMechanical Approach to Nanomachining of Silicon Using Oxide Characteristics Based on Tribo Nanolithography (TNL) in KOH Solution
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The TNL (Tribo Nanolithography) method in aqueous solution uses the atomic force microscopy as a machining tool for the nanoscale fabrication of silicon. A specially designed cantilever with a ...
Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper investigates nanomachining of single-crystal silicon using an atomic force microscope with a diamond-tip cantilever. To enable nanomachining of silicon, a nanomachining cantilever with ...