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RISA Comparison of X-Ray Microdiffraction and Coherent Gradient Sensing in Measuring Discontinuous Curvatures in Thin Film: Substrate Systems
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The coherent gradient sensor (CGS) is a shearing interferometer which has been proposed for the rapid, full-field measurement of deformation states (slopes and curvatures) in thin film-wafer ...