Abstract: Multilayer thin films of CuNb, CuNi, and CuNbNi with 20 nm individual layer thicknesses were fabricated by magnetron sputtering on oxide coated silicon wafers. The mechanical properties of the ...

Abstract: Nanoindentation is widely used to characterize the mechanical and interfacial properties of thin film systems. However, the effects of substrate compliance on the indentation response of compliant ...