| dc.description.abstract | Abstract. Fixed-abrasive lapping has been widely applied in the precision machining of hard and brittle materials. Its well-controlled abrasive motion and dominant two-body removal mechanism enable superior surface quality. However, due to multiple process parameters and the complex removal mechanism, surface quality control still relies heavily on empirical knowledge. To improve the controllability of the lapping process, this study proposes a two-dimensional microscale surface profile simulation model that incorporates pad topography, material removal mechanisms, and microscale contact characteristics. The model innovatively introduces dynamic profile baseline updating, abrasive scratching angle, and elastic recovery. Experiments were conducted on fused quartz under different lapping forces and lapping plate rotational speeds. The close agreement between the simulated and experimental results validates the model's effectiveness in predicting surface profile, surface roughness, and material removal rate. Furthermore, surface roughness analysis was used to optimize both lapping force and plate speed. This work provides new insights into the microscale evolution of surface profiles in fixed-abrasive lapping and offers a theoretical basis for process parameter optimization. | |
