Fabrication of Carbon Nanotube Gas Sensor Using Stepwise Dielectrophoretic Deposition Onto Interdigitated Pyrolyzed Carbon Electrodes

Abstract

Carbon nanotubes (CNTs) have been implemented in the creation of many micro- and nanodevices due to their physical properties such as large volume-to-surface area as well as their high thermal and electrical conductivity. The paper describes a novel dielectrophoretic stepwise deposition of CNTs (that alternates deposition of CNTs and drying steps) between the interdigitated fingers of carbon electrodes. Multiphysics simulation illustrates the physics of CNT alignment along the electrical field lines that forms a basis for dielectrophoretic deposition of CNTs. This fabrication methodology resulted in creation of proof-of-concept nitrogen gas sensor.