An Innovative Laser Metasurface Fabrication Technique for Highly Flexible Optoelectronic Devices

Abstract

Flexible optoelectronic devices have attracted considerable attention due to their low weight, portability, and ease of integration with other devices. However, major issues still exist: they are subject to repeated stresses, which often leads to damage; and the current fabrication methods such as photolithography and nano-imprint lithography can be very time-consuming or costly. This work aims to develop a novel cost-effective and time-efficient laser metasurface fabrication (LMF) technique for production of flexible optoelectronic devices. The experimental results have shown that the laser patterned flexible surfaces exhibit high visible transmittance, low sheet resistance, and extraordinary mechanical durability under repeated bending cycles. The laser patterned flexible surfaces have also demonstrated the potential to be utilized as heaters, which renders them new de-icing or de-fogging applications. This innovative laser patterning method will provide a new avenue for fabrication of multifunctional optoelectronic devices.