Show simple item record

A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications

dc.contributor.authorDuenner, Andrew
dc.contributor.authorYao, Tsung-Fu
dc.contributor.authorDe Hoyos, Bruno
dc.contributor.authorGonzales, Marianna
dc.contributor.authorRiojas, Nathan
dc.contributor.authorCullinan, Michael
dc.date.accessioned2017-11-25T07:18:35Z
dc.date.available2017-11-25T07:18:35Z
dc.date.copyright2016/10/10
dc.date.issued2016
dc.identifier.issn2166-0468
dc.identifier.otherjmnm_004_04_041006.pdf
dc.identifier.urihttp://138.201.223.254:8080/yetl1/handle/yetl/4235260
dc.publisherThe American Society of Mechanical Engineers (ASME)
dc.titleA Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications
dc.typeJournal Paper
dc.journal.volume4
dc.journal.issue4
dc.journal.titleJournal of Micro and Nano-Manufacturing
dc.identifier.doi10.1115/1.4034610
dc.journal.fristpage41006
dc.journal.lastpage041006-8
dc.treeJournal of Micro and Nano-Manufacturing:;2016:;volume( 004 ):;issue: 004
dc.contenttypeFulltext


Files in this item

Thumbnail
Name:
jmnm_004_04_041006.pdf
Size:
1.549Mb
Format:
PDF
View/Open

This item appears in the following Collection(s)

Show simple item record