Fabrication of a Micro/Nanofluidic Platform Via Three-Axis Robotic Dispensing System

Abstract

The purpose of this work is to introduce a new fabrication technique for creating a fluidic platform with embedded micro- or nanoscale channels. This new technique includes: (1) a three-axis robotic dispensing system for drawing micro/nanoscale suspended polymer fibers at prescribed locations, combined with (2) dry film resist photolithography, and (3) replica molding. This new technique provides flexibility and precise control of the micro- and nano-channel location with the ability to create multiple channels of varying sizes embedded in a single fluidic platform. These types of micro/nanofluidic platforms are attractive for numerous applications, such as the separation of biomolecules, cell transport, and transport across cell membranes via electroporation. The focus of this work is on the development of a fabrication technique for the creation of a nanoscale electroporation device.