Biochip for Single Cell Analysis Using Laser Microfabrication1

Abstract

We demonstrate laser microfabrication of transparent fluoric polymer using a conventional green laser. Fluoric polymers have unique characteristics such as high transparency, chemical resistance, and low refractive index and are expected to overcome many problems which conventional polymers have for biochip applications. We developed crackfree surface microfabrication of commercially available fluoric polymer commercially available fluoric polymer CYTOP (Asahi Glass Co., Ltd., Tokyo) using a conventional green laser. The laser ablation with successive wet etching by fluorine solution and annealing achieves highquality microfluidics on the surface of the polymer substrate. In addition, we demonstrate the fabrication of a biochip with a threedimensional fluid structure by bonding two pieces of CYTOP substrates for clear microscopic observation of swimming aquatic microorganism at the sidewall of the fluidics.