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dc.contributor.authorGandhi, Prasanna
dc.contributor.authorBhole, Kiran
dc.date.accessioned2017-05-09T01:01:49Z
dc.date.available2017-05-09T01:01:49Z
dc.date.issued2013
dc.identifier.issn2166-0468
dc.identifier.otherjmnm_001_04_041002.pdf
dc.identifier.urihttp://yetl.yabesh.ir/yetl/handle/yetl/152879
dc.description.abstractVarious ways of fabricating a threedimensional (3D) component in a singlelayer exposure using spatial variation of exposure dose have been presented in the literature. While some of them are based on dynamic mask process, more recently, a process based on varying intensity of a scanning Gaussian laser beam termed as “bulk lithographyâ€‌ has been proposed. In bulk lithography, the entire varying depth 3D microstructure gets fabricated because of spatial variation of intensity of laser imposed at every point in single layer scan. For the bulk lithography process, this paper first presents experimental characterization of unconstrained depth photopolymerization of resin upon exposure to Gaussian laser beam. Experimental characterization carried out for two resins systems: namely 1,6 hexane dioldiacrylate (HDDA) and trimethylolpropane triacrylate (TMPTA), over relatively wider range of Ar+ laser exposure dose and time, show behavior well beyond Beer–Lambert law. A unified empirical model is proposed to represent the nondimensional depth variation with respect to the time and energy of exposure for both resins. Finally, using these models, successful fabrication of several microstructures including microFresnel lens, textured curved surface, otherwise difficult or impossible to fabricate, is demonstrated. Several advantages of the bulk lithography as compared to other similar processes in the literature are highlighted.
dc.publisherThe American Society of Mechanical Engineers (ASME)
dc.titleCharacterization of “Bulk Lithographyâ€‌ Process for Fabrication of Three Dimensional Microstructures
dc.typeJournal Paper
dc.journal.volume1
dc.journal.issue4
dc.journal.titleJournal of Micro and Nano
dc.identifier.doi10.1115/1.4025461
dc.journal.fristpage41002
dc.journal.lastpage41002
dc.identifier.eissn1932-619X
dc.treeJournal of Micro and Nano-Manufacturing:;2013:;volume( 001 ):;issue: 004
dc.contenttypeFulltext


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