Integrated Double-Sided Neural Sensor With Dry-Etch BCB

Abstract

This paper presents a novel structure for a neural sensor using a surface micromachining technique with dry-etch benzocyclobutene selected as the substrate and packaging material. The finished device has intracortical recording sites on both sides and epidural recording sites on the front. The design doubled the total channel number of recording sites compared with the conventional single-sided electrode structure. The developed process shows reliable, high fabrication yield, and preliminary fabrication and impedance test results suggest that this newly developed neural sensor could improve the performance and efficiency of neural recording.