Modeling-Simulation and Analysis of MEMS Capacitive Millibar Pressure Sensor

Abstract

Design and simulation of MEMS based capacitive sensor with doubly supported serpentine meander structure for millibar pressure applications proposed in this work is analyzed using INTELLISUITE ™ and NISA ™ softwares. In this model, microsensing membrane (MSM) is simulated using gold, silicon, and platinum materials of 1 μm and 2 μm thickness. This model has the incorporation to study the sensitivity and spring constant of the support structures for different boundary conditions. The model is validated in terms of virtual force method and finite element method. The design performance of the model is analyzed for the MSM’s support structure stability, maximum permissible displacement limit, sensitivity, pull-in, hysteresis, and dynamic behavior for different pressure loads. Design consideration is taken care to avoid deformation of MSM for the application of pressure load. The spring constant and the effect of fringing field capacitance is evaluated to optimize the design. The key factors of design information for the fabrication of millibar pressure sensor are analyzed.