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Influence of the Fluid on the Experimental Performances of Triangular Silicon Microheat Pipes

dc.contributor.authorGuillaume Pandraud
dc.contributor.authorMartine Le Berre
dc.contributor.authorPanagiota Morfouli
dc.contributor.authorMonique Lallemand
dc.date.accessioned2017-05-09T00:19:36Z
dc.date.available2017-05-09T00:19:36Z
dc.date.copyrightSeptember, 2006
dc.date.issued2006
dc.identifier.issn1528-9044
dc.identifier.otherJEPAE4-26264#294_1.pdf
dc.identifier.urihttp://yetl.yabesh.ir/yetl/handle/yetl/133535
dc.description.abstractAn experimental study was conducted to determine the performances of silicon microheat pipes (MHPs) filled with different fluids. The MHP arrays are made of 27 triangular microchannels chemically etched in a silicon wafer. This wafer is closed by molecular bonding of a bulk oxidized silicon wafer. The results show that the use of MHPs with low liquid charges can increase the effective thermal conductivity of the array. The best improvement of the effective thermal conductivity of the MHP array is equal to 41% for methanol and pentane, 12% for ethanol and nil for water and FC72.
dc.publisherThe American Society of Mechanical Engineers (ASME)
dc.titleInfluence of the Fluid on the Experimental Performances of Triangular Silicon Microheat Pipes
dc.typeJournal Paper
dc.journal.volume128
dc.journal.issue3
dc.journal.titleJournal of Electronic Packaging
dc.identifier.doi10.1115/1.2229233
dc.journal.fristpage294
dc.journal.lastpage296
dc.identifier.eissn1043-7398
dc.keywordsSemiconductor wafers
dc.keywordsThermal conductivity
dc.keywordsPipes
dc.keywordsFluids
dc.keywordsSilicon
dc.keywordsMethanol
dc.keywordsMicrochannels
dc.keywordsBonding
dc.keywordsWater
dc.keywordsEthanol AND Temperature
dc.treeJournal of Electronic Packaging:;2006:;volume( 128 ):;issue: 003
dc.contenttypeFulltext


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