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RISMachining Complex Three-Dimensional Nanostructures With an Atomic Force Microscope Through the Frequency Control of the Tip Reciprocating Motions
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A novel method relying on atomic force microscope (AFM) tip based nanomachining is presented to enable the fabrication of microchannels that exhibit complex three-dimensional (3D) nanoscale floor surface geometries. To ...