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Thick Si-Doped DLC Coatings With High Load Bearing Capacity on Cold Working Tool Steels by PECVD
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: For improving the wear resistance, thick silicon doped hydrogenated amorphous carbon (a-SiC:H) coatings were deposited on cold working tool steels by plasma-enhanced chemical vapor deposition (PECVD) technology. The increase ...