Abstract: Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of ...

Abstract: Microfilters for collecting micron-size airborne biological agents are designed and fabricated using a micro-electro-mechanical-system (MEMS) fabrication technology. The thickness of the microfilter ...

Abstract: When the particle is in the order of microns, flow through the small opening produces a large velocity gradient, leading to high viscous dissipation. Understanding the flow field is critical ...