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RISComparative Study of the Effect of Basalt Fiber on Dynamic Damage Characteristics of Ceramics Cement–Based Porous Material
Publisher: American Society of Civil Engineers
Abstract: Cementitious materials, ceramic aggregates, and fiber are used as basic materials; ceramics cement–based porous material (CCPM) and basalt fiber-reinforced ceramics cement–based porous material (BFRCCPM) are prepared on ...
Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper introduces a novel wafer-edge quality inspection method based on analysis of curved-edge diffractive fringe patterns, which occur when light is incident and diffracts around the wafer edge. The proposed method ...