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RISOn the Planarization Mechanism and Pad Aging Effects of Soft Pad Polishing: A Perspective From the Micro-Mechanical Properties of Soft Pads
Publisher: American Society of Mechanical Engineers (ASME)
Abstract: The local viscoelastic properties of soft polishing pads with different usage durations are measured by a micro-scale mechanical analysis testing platform. The testing reveals stimulus-adaptive local viscoelasticity of ...