Abstract: Parametric resonators that show large amplitude of vibration are highly desired for sensing applications. In this paper, a microelectromechanical system (MEMS) parametric resonator with a flexible support that uses ...

Abstract: Vibration energy harvesting can be an effective method for scavenging wasted mechanical energy for use by wireless sensors that have limited battery life. Two major goals in designing energy harvesters are enhancing the ...

Abstract: In this study, a two-step experimental procedure is described to determine the electrostatic levitation force in micro-electromechanical system transducers. In these two steps, the microstructure is excited quasi-statically ...