Search
Now showing items 1-1 of 1
Dynamic Responses of a Self-Moving Precision Positioning Stage Impacted by a Spring-Mounted Piezoelectric Actuator
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and ...